- Check laser gas quality
- Check exhaust pump and turbo blower oil
- Check laser output and cooling water.
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- Mirror alignment, cleaning, and replacement
- Oil filter change, O-ring change, oil change.
- Laser gas and cooling water pipe maintenance.
- Test oscillator vacuum for leaks.
- Perform laser oscillation test to achieve discharge aging.
- Test resonator oscillation characteristics and output.
- Check laser beam mode and optical axis adjustment.